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Improvement of the quality of a-SiGe:H films
M. Sadamoto, K. Saitoh, N. Ishiguro, N. Yanagawa, H. Tanaka, S. Fukuda, Y. Ashida, N. FukudaVolume:
198-200
Year:
1996
Language:
english
Pages:
1109
DOI:
10.1016/0022-3093(96)00055-5
File:
PDF, 255 KB
english, 1996