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The grain size in microcrystalline silicon: correlation between atomic force microscopy, UV reflectometry, ellipsometry, and X-ray diffractometry
E. Bardet, J.E. Bourée, M. Cuniot, J. Dixmier, P. Elkaim, J. Le Duigou, A.R. Middya, J. PerrinVolume:
198-200
Year:
1996
Language:
english
Pages:
871
DOI:
10.1016/0022-3093(96)00072-5
File:
PDF, 355 KB
english, 1996