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Microcrystalline silicon growth by the layer-by-layer technique: long term evolution and nucleation mechanisms
Pere Roca i Cabarrocas, Nacer Layadi, Bernard Drevillon, Ionel SolomonVolume:
198-200
Year:
1996
Language:
english
Pages:
875
DOI:
10.1016/0022-3093(96)00073-7
File:
PDF, 253 KB
english, 1996