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Fabrication of high-quality poly-Si thin films combined with in situ real-time spectroscopic ellipsometry
Tetsuya Akasaka, Isamu ShimizuVolume:
198-200
Year:
1996
Language:
english
Pages:
887
DOI:
10.1016/0022-3093(96)00075-0
File:
PDF, 261 KB
english, 1996