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The effect of hydrogen species on the electronic properties of nc-Si:H prepared in a triode PECVD system
Kunji Chen, Hua Qin, Xinfan Huang, Kazuyuki Ikuta, Akihisa Matsuda, Kazunobu TanakaVolume:
198-200
Year:
1996
Language:
english
Pages:
895
DOI:
10.1016/0022-3093(96)00077-4
File:
PDF, 237 KB
english, 1996