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Prospects for utilizing low temperature amorphous to crystalline phase transformation to define circuit elements; a new frontier for very large scale integrated technology
Charles M. Fortmann, Isamu ShimizuVolume:
198-200
Year:
1996
Language:
english
Pages:
1151
DOI:
10.1016/0022-3093(96)00101-9
File:
PDF, 330 KB
english, 1996