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Initial stages of microcrystalline silicon film growth
S. Koynov, S. Grebner, P. Radojkovic, E. Hartmann, R. Schwarz, L. Vasilev, R. Krankenhagen, I. Sieber, W. Henrion, M. SchmidtVolume:
198-200
Year:
1996
Language:
english
Pages:
1017
DOI:
10.1016/0022-3093(96)00162-7
File:
PDF, 396 KB
english, 1996