International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
2011 Vol. 24; Iss. 6
The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures
M. Radmilović-Radjenović, B. Radjenović, M. SavićVolume:
24
Year:
2011
Language:
english
Pages:
10
DOI:
10.1002/jnm.798
File:
PDF, 428 KB
english, 2011