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ECR-plasma assisted laser ablation of as-deposited superconducting thin films for application in microelectronics
Kristin Deneffe, Piet Van Mieghem, Bert Brijs, Wilfried Van Der Vorst, Robert Mertens, Gustaaf BorghsVolume:
164-165
Year:
1990
Language:
english
Pages:
315
DOI:
10.1016/0022-5088(90)90227-b
File:
PDF, 481 KB
english, 1990