![](/img/cover-not-exists.png)
Preparation of polymer films from hexamethylcyclotrisilazane in the plasma of high-frequency discharge
T.P. Smirnova, L.V. Khramova, V.I. Belyi, A.P. Solov'yev, I.V. TaranovaVolume:
30
Year:
1988
Language:
english
Pages:
189
DOI:
10.1016/0032-3950(88)90273-0
File:
PDF, 349 KB
english, 1988