Structure of silicon oxide on Si(001) grown at low temperatures
Isao Takahashi, Kouki Nakano, Jimpei Harada, Takayoshi Shimura, Masataka UmenoVolume:
315
Year:
1994
Language:
english
Pages:
1
DOI:
10.1016/0039-6028(94)90125-2
File:
PDF, 372 KB
english, 1994