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Scattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: implications for sticking coefficients and reaction product formation
Gabriela C. Weaver, Stephen R. LeoneVolume:
328
Year:
1995
Language:
english
Pages:
215
DOI:
10.1016/0039-6028(95)00035-6
File:
PDF, 1.50 MB
english, 1995