Thermal nitridation of the Si(110) by NH3: LEED and AES...

Surface Science 1995 Vol. 331-333; Iss. part-PA

Thermal nitridation of the Si(110) by NH3: LEED and AES study

A.A. Saranin, O.L. Tarasova, V.G. Kotljar, E.A. Khramtsova, V.G. Lifshits
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Volume:
331-333
Year:
1995
Language:
english
Pages:
464
DOI:
10.1016/0039-6028(95)00310-x
File:
PDF, 409 KB
english, 1995
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