Laser modifications of Si(100) : Cl surfaces induced by...

Surface Science 1995 Vol. 338; Iss. 1-3

Laser modifications of Si(100) : Cl surfaces induced by surface melting: etching and cleaning

B. Bourguignon, M. Stoica, B. Dragnea, S. Carrez, J. Boulmer, J.-P. Budin, D. Débarre, A. Aliouchouche
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Volume:
338
Year:
1995
Language:
english
Pages:
111
DOI:
10.1016/0039-6028(95)00518-8
File:
PDF, 1.68 MB
english, 1995
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