Oscillations of step velocity at sputtering of Si(111) vicinal surfaces by low-energy Xe ions
A.V. Dvurechenskii, V.A. Zinovyev, A.F. FaizullinaVolume:
347
Year:
1996
Language:
english
Pages:
117
DOI:
10.1016/0039-6028(95)00907-8
File:
PDF, 386 KB
english, 1996