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Application of high-energy synchrotron-radiation XPS to determine the thickness of SiO2 thin films on Si(100)
Hiroyuki Yamamoto, Yuji Baba, Teikichi A. SasakiVolume:
349
Year:
1996
Language:
english
Pages:
1
DOI:
10.1016/0039-6028(95)01332-6
File:
PDF, 324 KB
english, 1996