Preparation of Si3N4SiC films by plasma CVD
Kiichiro Kamata, Yuuji Maeda, Kanji Yasui, Minoru MoriyamaVolume:
2
Year:
1986
Language:
english
DOI:
10.1016/0267-3762(86)90057-3
File:
PDF, 50 KB
english, 1986