Nitridation of silicon compact in a gas mixture of nitrogen...

International Journal of High Technology Ceramics 1987 Vol. 3; Iss. 1

Nitridation of silicon compact in a gas mixture of nitrogen and hydrogen

Yachio Seki, Masatane Kadota, Isao Kondoh, Tsuneo Uetsuki
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Volume:
3
Year:
1987
Language:
english
DOI:
10.1016/0267-3762(87)90068-3
File:
PDF, 65 KB
english, 1987
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