Preparation of fine silicon nitride powders by vapor phase...

International Journal of High Technology Ceramics 1987 Vol. 3; Iss. 4

Preparation of fine silicon nitride powders by vapor phase reaction of nitrogen containing organosilicon compound with ammonia

Takasi Suzuki, Takamasa Kawakami, Takesi Koyama, Kansei Izaki, Rieko Nakano, Takuji Shitara, Koichi Hakkei, Toshio Hirai, Koichi Niihara
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Volume:
3
Year:
1987
Language:
english
Pages:
335
DOI:
10.1016/0267-3762(87)90102-0
File:
PDF, 123 KB
english, 1987
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