Ceramic turbomolecular pumping system in reactor structure of FER
K. Ioki, A. Kameari, N. Ueda, K. Hikita, S. Hata, T. Abe, H. Iida, Y. MurakamiVolume:
10
Year:
1989
Language:
english
Pages:
231
DOI:
10.1016/0920-3796(89)90057-4
File:
PDF, 2.37 MB
english, 1989