The role of oxygen in optical activation of Er implanted in Si
H. Przybylinska, G. Hendorfer, M. Bruckner, W. Jantsch, L. PalmetshoferVolume:
225
Year:
1995
Language:
english
Pages:
559
DOI:
10.1016/0925-8388(94)07088-1
File:
PDF, 330 KB
english, 1995