Characterization of a boro-silicon oxynitride prepared by...

Journal of Alloys and Compounds 1996 Vol. 232; Iss. 1-2

Characterization of a boro-silicon oxynitride prepared by thermal nitridation of a polyborosiloxane

L. Bois, P. L'Haridon, Y. Laurent, X. Gouin, P. Grange, J.-F. Létard, M. Birot, J.-P. Pillot, J. Dunoguès
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Volume:
232
Year:
1996
Language:
english
Pages:
254
DOI:
10.1016/0925-8388(95)01982-0
File:
PDF, 895 KB
english, 1996
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