Crystal orientation control of polycrystalline TiN thin...

Applied Surface Science 2011 Vol. 258; Iss. 2

Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

Kazuhiro Kato, Hideo Omoto, Atsushi Takamatsu, Takao Tomioka
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Volume:
258
Year:
2011
Language:
english
Pages:
695
DOI:
10.1016/j.apsusc.2011.07.098
File:
PDF, 1.12 MB
english, 2011
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