Study on oxygen source and its effect on film properties of...

Study on oxygen source and its effect on film properties of ZnO deposited by radio frequency magnetron sputtering

Yudai Kamada, Mamoru Furuta, Takahiro Hiramatsu, Toshiyuki Kawaharamura, Dapeng Wang, Shin-ichi Shimakawa, Chaoyang Li, Shizuo Fujita, Takashi Hirao
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Volume:
258
Year:
2011
Language:
english
Pages:
700
DOI:
10.1016/j.apsusc.2011.07.100
File:
PDF, 895 KB
english, 2011
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