Study on oxygen source and its effect on film properties of ZnO deposited by radio frequency magnetron sputtering
Yudai Kamada, Mamoru Furuta, Takahiro Hiramatsu, Toshiyuki Kawaharamura, Dapeng Wang, Shin-ichi Shimakawa, Chaoyang Li, Shizuo Fujita, Takashi HiraoVolume:
258
Year:
2011
Language:
english
Pages:
700
DOI:
10.1016/j.apsusc.2011.07.100
File:
PDF, 895 KB
english, 2011