Effects of post-annealing on the structural and...

Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering

Szu-Ko Wang, Ting-Chun Lin, Sheng-Rui Jian, Jenh-Yih Juang, Jason S.-C. Jang, Jiun-Yi Tseng
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Volume:
258
Year:
2011
Language:
english
Pages:
1267
DOI:
10.1016/j.apsusc.2011.09.088
File:
PDF, 1.45 MB
english, 2011
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