Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography
Alborz Amirsadeghi, Jae Jong Lee, Sunggook ParkVolume:
258
Year:
2011
Language:
english
Pages:
1279
DOI:
10.1016/j.apsusc.2011.09.090
File:
PDF, 691 KB
english, 2011