The role of target-to-substrate distance on the DC...

The role of target-to-substrate distance on the DC magnetron sputtered zirconia thin films’ bioactivity

Arisara Thaveedeetrakul, Nirun Witit-anun, Virote Boonamnuayvitaya
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Volume:
258
Year:
2012
Language:
english
Pages:
2620
DOI:
10.1016/j.apsusc.2011.10.104
File:
PDF, 1.91 MB
english, 2012
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