Ion trajectories and shadow effects in mesh-assisted plasma...

Applied Surface Science 2012 Vol. 258; Iss. 7

Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator

Yongxian Huang, Xiubo Tian, Shixiong Lv, Shiqin Yang, R.K.Y. Fu, Paul K. Chu, Jinsong Leng, Yao Li
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Volume:
258
Year:
2012
Language:
english
Pages:
2914
DOI:
10.1016/j.apsusc.2011.11.006
File:
PDF, 1.04 MB
english, 2012
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