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Thermal reliability of thin SiGe epilayers
Ming-Jhang Wu, Hua-Chiang Wen, Tun-Yuan Chiang, Chien-Huang Tsai, Wen-Kuang Hsu, Chang-Pin ChouVolume:
258
Year:
2012
Language:
english
Pages:
5005
DOI:
10.1016/j.apsusc.2011.12.101
File:
PDF, 1.08 MB
english, 2012