A micro-spectroscopy study on the influence of chemical residues from nanofabrication on the nitridation chemistry of Al nanopatterns
B. Qi, S. Ólafsson, A.A. Zakharov, B. Agnarsson, H.P. Gislason, M. GöthelidVolume:
258
Year:
2012
Language:
english
Pages:
4507
DOI:
10.1016/j.apsusc.2012.01.015
File:
PDF, 1.08 MB
english, 2012