The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment
Han Liang, Liu Delian, Chen Xian, Yang Li, Zhao YuqingVolume:
258
Year:
2012
Language:
english
Pages:
4801
DOI:
10.1016/j.apsusc.2012.01.100
File:
PDF, 641 KB
english, 2012