Development of an industrial tool to make passivation...

Applied Surface Science 2012 Vol. 258; Iss. 23

Development of an industrial tool to make passivation layers for UV sensors improvement

Yannick Larmande, Vanessa Vervisch, Philippe Delaporte, Thierry Sarnet, Marc Sentis, Hasnaa Etienne, Frank Torregrosa
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Volume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.02.054
File:
PDF, 494 KB
english, 2012
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