Removal of nanoparticles from a silicon wafer using plasma shockwaves excited with a femtosecond laser
Jung-Kyu Park, Ji-Wook Yoon, Sung-Hak ChoVolume:
258
Year:
2012
Language:
english
Pages:
6384
DOI:
10.1016/j.apsusc.2012.03.044
File:
PDF, 1.16 MB
english, 2012