Grain-size effect on the preferred orientation of TiC/α-C:H thin films
Yadong Su, Xiangming Wang, Huaming Wang, Mao Wen, Weitao ZhengVolume:
258
Year:
2012
Language:
english
Pages:
6807
DOI:
10.1016/j.apsusc.2012.03.094
File:
PDF, 1016 KB
english, 2012