Atmospheric pressure diffuse plasma in ambient air for ITO...

Applied Surface Science 2012 Vol. 258; Iss. 18

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Tomáš Homola, Jindřich Matoušek, Veronika Medvecká, Anna Zahoranová, Martin Kormunda, Dušan Kováčik, Mirko Černák
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Volume:
258
Year:
2012
Language:
english
Pages:
7140
DOI:
10.1016/j.apsusc.2012.03.188
File:
PDF, 580 KB
english, 2012
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