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A comparison of the mechanical stability of silicon nitride films deposited with various techniques
Pierre Morin, Gaetan Raymond, Daniel Benoit, Patrick Maury, Remi BeneytonVolume:
260
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.04.003
File:
PDF, 410 KB
english, 2012