Identification of nanoscale structure and morphology...

Applied Surface Science 2012 Vol. 260; Iss. none

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

A.V. Vasin, A.V. Rusavsky, A.N. Nazarov, V.S. Lysenko, P.M. Lytvyn, V.V. Strelchuk, K.I. Kholostov, V.P. Bondarenko, S.P. Starik
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Volume:
260
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.04.016
File:
PDF, 1.06 MB
english, 2012
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