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Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers
Peihong Wang, Hejun Du, Shengnan Shen, Mingsheng Zhang, Bo LiuVolume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.04.158
File:
PDF, 1.13 MB
english, 2012