First observation on the feasibility of scratch formation...

Applied Surface Science 2012 Vol. 258; Iss. 20

First observation on the feasibility of scratch formation by pad–particle mixture in CMP process

In-Ha Sung, Hong Jin Kim, Chang Dong Yeo
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Volume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.05.044
File:
PDF, 2.55 MB
english, 2012
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