rf Power dependence on the chemical and structural...

Applied Surface Science 2012 Vol. 258; Iss. 22

rf Power dependence on the chemical and structural properties of copper oxide thin films obtained at various oxygen fractions

Kyounga Lim, Juyun Park, Do-Geun Kim, Jong-Kuk Kim, Jae-Wook Kang, Yong-Cheol Kang
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Volume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.05.159
File:
PDF, 1016 KB
english, 2012
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