Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: A comparison
Pierre Lorenz, Martin Ehrhardt, Klaus ZimmerVolume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.06.023
File:
PDF, 801 KB
english, 2012