Facile preparation of sol–gel-derived ultrathin and high-dielectric zirconia films for capacitor devices
Hsin-Chiang You, Chun-Ming Chang, Tzeng-Feng Liu, Chih-Chia Cheng, Feng-Chih Chang, Fu-Hsiang KoVolume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.06.079
File:
PDF, 618 KB
english, 2012