Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(1 0 0) substrates by APCVD
Biao Shi, Xue-Chao Liu, Ming-Xing Zhu, Jian-Hua Yang, Er-Wei ShiVolume:
259
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.07.097
File:
PDF, 1.10 MB
english, 2012