Effect of propane/silane ratio on the growth of 3C-SiC thin...

Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(1 0 0) substrates by APCVD

Biao Shi, Xue-Chao Liu, Ming-Xing Zhu, Jian-Hua Yang, Er-Wei Shi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
259
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.07.097
File:
PDF, 1.10 MB
english, 2012
Conversion to is in progress
Conversion to is failed