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Effect of controlled O2 impurities on N2 afterglows of RF discharges
Namjun Kang, Minwook Lee, André Ricard, Soo-ghee OhVolume:
12
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2012.04.009
File:
PDF, 460 KB
english, 2012