Polycrystalline silicon thin films prepared by Ni silicide induced crystallization and the dopant effects on the crystallization
Shanglong Peng, Na Feng, Duokai Hu, Deyan He, Chang-Woo Byun, Yong Woo Lee, Seung-Ki JooVolume:
12
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2012.04.014
File:
PDF, 1.32 MB
english, 2012