Polycrystalline silicon thin films prepared by Ni silicide...

Polycrystalline silicon thin films prepared by Ni silicide induced crystallization and the dopant effects on the crystallization

Shanglong Peng, Na Feng, Duokai Hu, Deyan He, Chang-Woo Byun, Yong Woo Lee, Seung-Ki Joo
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Volume:
12
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2012.04.014
File:
PDF, 1.32 MB
english, 2012
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