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Effects of experimental parameters on NF3 decomposition fraction in an oxygen-based RF plasma environment
Ya-Fen Wang, Lin-Chi Wang, MinLiang Shih, Cheng-Hsien TsaiVolume:
57
Year:
2004
Language:
english
Pages:
1164
DOI:
10.1016/j.chemosphere.2004.08.026
File:
PDF, 314 KB
english, 2004