Effects of experimental parameters on NF3 decomposition...

Effects of experimental parameters on NF3 decomposition fraction in an oxygen-based RF plasma environment

Ya-Fen Wang, Lin-Chi Wang, MinLiang Shih, Cheng-Hsien Tsai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
57
Year:
2004
Language:
english
Pages:
1164
DOI:
10.1016/j.chemosphere.2004.08.026
File:
PDF, 314 KB
english, 2004
Conversion to is in progress
Conversion to is failed