Characterization and depth profiles measurements of silicon...

Computational Materials Science 2005 Vol. 33; Iss. 1-3

Characterization and depth profiles measurements of silicon nitride thin films on silicon and molybdenum substrates by Auger electron spectroscopy

Chakib Fakih, Glades Bachir Fakih, Ali Kaafarani, M. Zoaeter, René Sylvain Bes, René Berjoan
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Volume:
33
Year:
2005
Language:
english
Pages:
400
DOI:
10.1016/j.commatsci.2004.12.007
File:
PDF, 124 KB
english, 2005
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