Simulation of surface relief effect on ALD process
I.G. Neizvestny, N.L. Shwartz, Z. Sh. Yanovitskaja, A.V. ZverevVolume:
36
Year:
2006
Language:
english
Pages:
42
DOI:
10.1016/j.commatsci.2005.03.019
File:
PDF, 401 KB
english, 2006