Set of equations for transient enhanced diffusion in...

Computational Materials Science 2008 Vol. 43; Iss. 2

Set of equations for transient enhanced diffusion in shallow ion-implanted layers

O.I. Velichko, Yu.P. Shaman, A.K. Fedotov, A.V. Masanik
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Volume:
43
Year:
2008
Language:
english
Pages:
286
DOI:
10.1016/j.commatsci.2007.10.011
File:
PDF, 194 KB
english, 2008
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