![](/img/cover-not-exists.png)
Intelligent optical proximity correction using genetic algorithm with model- and rule-based approaches
Yiming Li, Shao-Ming Yu, Yih-Lang LiVolume:
45
Year:
2009
Language:
english
Pages:
77
DOI:
10.1016/j.commatsci.2008.04.031
File:
PDF, 3.47 MB
english, 2009